Fabrication of High-eciency Multilayer-coated Binary Blazed Gratings in the Euv Regime
نویسندگان
چکیده
Improving the eciency of soft X-ray and extreme ultraviolet (EUV) gratings by way of multilayer re¯ection coatings has been under investigation for many years. Here we present the fabrication and characterization of binary blazed gratings designed to operate in the 14 nm wavelength region. These binary gratings are stepped approximations to the ideal sawtooth blazed-grating pro®le and are fabricated directly into a layer of photoresist. Normal-incidence re¯ection eciencies as high as 25% into the ®rst-diracted order have been demonstrated. Ó 2001 Published by Elsevier Science B.V.
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